Product Category menu

Category background

Cassetteless Wet Station

Product Detail Information

Features

Application wafer size
8"& 12" wafer
Wafer quantity
of each batch
25 ~ 50 wafers
(1 cassette or 2 cassettes)
Main body
Antistatic Ivory PVC (SUS304 frame)
Bath Materials
PTFE or Quartz
Loader/Unloader
4 cassettes ~ 8 cassettes stock
High system reliability
More than 97% up-rate
Wafer transfer robot
Front driving robot using Servo-motor
Dryer
Spin Dryer, IPA Dryer or Marangoni Dryer
System control
PLC control & WSMS(Wet Station Management System)
Minimization of particle with Face to Face system
Data interface
protocol
Host communication with GEM/SECS II & HSMS
Others
Hot DIW unit, Chemicalyzer, O3 generator