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Cassetteless Wet Station

Product Detail Information


Application wafer size
8"& 12" wafer
Wafer quantity
of each batch
25 ~ 50 wafers
(1 cassette or 2 cassettes)
Main body
Antistatic Ivory PVC (SUS304 frame)
Bath Materials
PTFE or Quartz
4 cassettes ~ 8 cassettes stock
High system reliability
More than 97% up-rate
Wafer transfer robot
Front driving robot using Servo-motor
Spin Dryer, IPA Dryer or Marangoni Dryer
System control
PLC control & WSMS(Wet Station Management System)
Minimization of particle with Face to Face system
Data interface
Host communication with GEM/SECS II & HSMS
Hot DIW unit, Chemicalyzer, O3 generator