Features
Application wafer size
|
4"& 12" wafer
|
Wafer quantity
of each batch |
1 cassette or 2 cassettes
|
Main body
|
Antistatic Ivory PVC (SUS304 frame)
|
Bath Materials
|
PTFE or Quartz
|
Loader/Unloader
|
1 cassettes ~ 8 cassettes stock
|
High system reliability
|
More than 97% up-rate
|
Wafer transfer robot
|
Front driving robot using Servo-motor
|
Dryer
|
Spin Dryer, IPA Dryer or Marangoni Dryer
|
System control
|
PLC control & WSMS(Wet Station Management System)
|
Data interface
protocol |
Host communication with GEM/SECS II & HSMS
|
Others
|
Hot DIW unit, Chemicalyzer, O3 generator
|