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Automatic Wet Station
- [Basic Infomation]
- Trader
-
South Korea
- KITA MEMBER
Product Detail Information
Features
|
Application wafer size
|
4"& 12" wafer
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Wafer quantity
of each batch |
1 cassette or 2 cassettes
|
|
Main body
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Antistatic Ivory PVC (SUS304 frame)
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|
Bath Materials
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PTFE or Quartz
|
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Loader/Unloader
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1 cassettes ~ 8 cassettes stock
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High system reliability
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More than 97% up-rate
|
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Wafer transfer robot
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Front driving robot using Servo-motor
|
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Dryer
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Spin Dryer, IPA Dryer or Marangoni Dryer
|
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System control
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PLC control & WSMS(Wet Station Management System)
|
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Data interface
protocol |
Host communication with GEM/SECS II & HSMS
|
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Others
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Hot DIW unit, Chemicalyzer, O3 generator
|