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Automatic Wet Station

Product Detail Information

Features

Application wafer size
4"& 12" wafer
Wafer quantity
of each batch
1 cassette or 2 cassettes
Main body
Antistatic Ivory PVC (SUS304 frame)
Bath Materials
PTFE or Quartz
Loader/Unloader
1 cassettes ~ 8 cassettes stock
High system reliability
More than 97% up-rate
Wafer transfer robot
Front driving robot using Servo-motor
Dryer
Spin Dryer, IPA Dryer or Marangoni Dryer
System control
PLC control & WSMS(Wet Station Management System)
Data interface
protocol
Host communication with GEM/SECS II & HSMS
Others
Hot DIW unit, Chemicalyzer, O3 generator